How much does a Senior Process Technician make in Chicago, IL?

As of April 01, 2025, the average annual salary for a Senior Process Technician in Chicago, IL is $63,182. Salary.com reports that pay typically ranges from $59,650 to $67,516, with most professionals earning between $56,434 and $71,461.

Search Senior Process Technician Jobs in Chicago, IL

Salary range for a Senior Process Technician
$59,650 to $67,516
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Senior Process Technician

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How much should you be earning in Senior Process Technician in Chicago, IL based on your current experience?
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RELEVANT JOB EXPERIENCE

Length of experience is a pay differentiator. Those with greater experience may have an advantage in negotiating salary. For those with less experience, other factors such as education or special skills could impact your pay. Please visit Professional Salary Report for more details.
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LEVEL OF EDUCATION

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Average Base Salary

Core compensation

 
 
 
59650
67516
63182

Average Total Cash Compensation

Includes base and annual incentives

 
 
 
61144
69828
65658
What is the average salary for Senior Process Technician in 2025?
These charts show the average base salary (core compensation), as well as the average total cash compensation for the job of Senior Process Technician in Chicago, IL. The base salary for Senior Process Technician ranges from $59,650 to $67,516 with the average base salary of $63,182. The total cash compensation, which includes base, and annual incentives, can vary anywhere from $61,144 to $69,828 with the average total cash compensation of $65,658.
Average Salary Average Salary Range
Base Salary $63,182 $59,650 - $67,516
Bonus $2,475 $1,494 - $2,312
Total Pay $65,658 $61,144 - $69,828
* Base Salary represents gross income before taxes and deductions. It does not include additional pay such as benefits, bonuses, profit sharing or commissions.
* Total Pay combines base salary, bonuses, profit sharing, tips, commissions, overtime pay and other forms of cash earnings, as applicable for this job.
CITY, STATE AVERAGE SALARY RANGE COMPARE TO Chicago, IL
CITY, STATE Cicero, IL AVERAGE SALARY RANGE $59,650 - $67,516 COMPARE TO Chicago, IL 0%
CITY, STATE Oak Park, IL AVERAGE SALARY RANGE $59,650 - $67,516 COMPARE TO Chicago, IL 0%
CITY, STATE Oak Lawn, IL AVERAGE SALARY RANGE $59,581 - $67,437 COMPARE TO Chicago, IL
CITY, STATE Evanston, IL AVERAGE SALARY RANGE $59,627 - $67,489 COMPARE TO Chicago, IL
CITY, STATE Skokie, IL AVERAGE SALARY RANGE $59,627 - $67,489 COMPARE TO Chicago, IL
CITY, STATE Arlington Heights, IL AVERAGE SALARY RANGE $58,403 - $66,104 COMPARE TO Chicago, IL
See salaries for Senior Process Technician in locations close to Chicago, IL. Pay for the same job may vary based on the location and on the location and on other factors such as the size of company, the industry, and other local conditions.
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JOB TITLE LOCATION MINIMUM SALARY MAXIMUM SALARY
JOB TITLE Senior Wafer Process Technician LOCATION Chicago, IL MINIMUM SALARY $60,000 MAXIMUM SALARY $73,200
JOB TITLE Technician, Senior - Process Engineering LOCATION Chicago, IL MINIMUM SALARY $57,900 MAXIMUM SALARY $69,800
JOB TITLE Process Engineering Technician III LOCATION Chicago, IL MINIMUM SALARY $57,869 MAXIMUM SALARY $69,746
JOB TITLE Process Engineering Technician I LOCATION Chicago, IL MINIMUM SALARY $43,343 MAXIMUM SALARY $51,274
JOB TITLE Wafer Process Technician III LOCATION Chicago, IL MINIMUM SALARY $59,954 MAXIMUM SALARY $73,174
JOB TITLE Validation Process Technician I LOCATION Chicago, IL MINIMUM SALARY $40,600 MAXIMUM SALARY $49,100
The Senior Process Technician job could be listed using titles that are not exactly the same, but actually are for the same or very similar job. Here are some job titles in Chicago, IL that might be a good fit for the type of job and salary you are looking for.

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59650
67516

 

About Chicago, Illinois    Chicago (/ʃɪˈkɑːɡoʊ/ (listen), locally also /-ˈkɔː-/), officially the City of Chicago, is the most populous city in Illinois, as well as the third mos....More

Chicago, Illinois  area prices were up 0.8% from a year ago

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